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A Two-Color Heterodyne Interferometer Based on Diffraction Grating for Displacement Measurement
A Two-Color Heterodyne Interferometer Based on Diffraction Grating for Displacement Measurement
A Two-Color Heterodyne Interferometer Based on Diffraction Grating for Displacement Measurement
Wu, G. H. (author) / Cai, Z. J. (author) / Zeng, L. J. (author) / Gao, Y. / Tse, S. / Gao, W.
2005-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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