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Diamond-like carbon coatings on microdrill using an ECR-CVD system

Ueng, H. Y. / Guo, C. T.

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Diamond-like carbon coatings on microdrill using an ECR-CVD system

Ueng, H. Y. / Guo, C. T.

Diamond-like carbon coatings on microdrill using an ECR-CVD system

Ueng, H. Y. / Guo, C. T.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Diamond-like carbon coatings on microdrill using an ECR-CVD system

Contributors:

Ueng, H. Y. (author) / Guo, C. T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 249 ; 246-256

Publication date:

2005-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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