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    Surface morphology of sputter deposited W-Si-N composite coatings characterized by atomic force microscopy

    New search for: Fu, T.
    New search for: Shen, Y. G.
    New search for: Zhou, Z. F.
    New search for: Li, K. Y.

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    Surface morphology of sputter deposited W-Si-N composite coatings characterized by atomic force microscopy

    New search for: Fu, T.
    New search for: Shen, Y. G.
    New search for: Zhou, Z. F.
    New search for: Li, K. Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Surface morphology of sputter deposited W-Si-N composite coatings characterized by atomic force microscopy

    New search for: Fu, T.
    New search for: Shen, Y. G.
    New search for: Zhou, Z. F.
    New search for: Li, K. Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Surface morphology of sputter deposited W-Si-N composite coatings characterized by atomic force microscopy

    Contributors:

    Fu, T. (author) / Shen, Y. G. (author) / Zhou, Z. F. (author) / Li, K. Y. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 123 ; 158-162

    Publication date:

    2005-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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