Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Characterization of nano-structured TiN thin films prepared by R.F. magnetron sputtering

    New search for: Kim, T. S.
    New search for: Park, S. S.
    New search for: Lee, B. T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Characterization of nano-structured TiN thin films prepared by R.F. magnetron sputtering

    New search for: Kim, T. S.
    New search for: Park, S. S.
    New search for: Lee, B. T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of nano-structured TiN thin films prepared by R.F. magnetron sputtering

    New search for: Kim, T. S.
    New search for: Park, S. S.
    New search for: Lee, B. T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characterization of nano-structured TiN thin films prepared by R.F. magnetron sputtering

    Contributors:

    Kim, T. S. (author) / Park, S. S. (author) / Lee, B. T. (author)

    Published in:

    MATERIALS LETTERS ; 59 ; 3929-3932

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    LaB~x thin films prepared by magnetron sputtering

    Kinbara, A. / Nakano, T. / Kobayashi, A. et al. | British Library Online Contents | 1993

    LaB~x thin films prepared by magnetron sputtering

    Kinbara, A. / Nakano, T. / Kobayashi, A. et al. | British Library Online Contents | 1993

    Nano-structured CrN/CN~x multilayer films deposited by magnetron sputtering

    Vyas, A. / Shen, Y.G. / Zhou, Z.F. et al. | British Library Online Contents | 2008

    Structure characterization of vanadium oxide thin films prepared by magnetron sputtering methods

    Cui, J. / Da, D. / Jiang, W. | British Library Online Contents | 1998

    Properties of TiO~2 Thin Films Prepared by Magnetron Sputtering

    Zhang, W. / Li, Y. / Wang, F. | British Library Online Contents | 2002

    Back to top