Chemical Solution Deposition of PZT/Oxide Electrode Thin Film Capacitors with Preferred Orientation on Si Substrate: Fid-Bau Portal

Chemical Solution Deposition of PZT/Oxide Electrode Thin Film Capacitors with Preferred Orientation on Si Substrate

Suzuki, H. / Miwa, Y. / Ohno, T. / Fujimoto, M.

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Chemical Solution Deposition of PZT/Oxide Electrode Thin Film Capacitors with Preferred Orientation on Si Substrate

Suzuki, H. / Miwa, Y. / Ohno, T. / Fujimoto, M.

Chemical Solution Deposition of PZT/Oxide Electrode Thin Film Capacitors with Preferred Orientation on Si Substrate

Suzuki, H. / Miwa, Y. / Ohno, T. / Fujimoto, M.

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Check availability in my library

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Document information

Title:

Chemical Solution Deposition of PZT/Oxide Electrode Thin Film Capacitors with Preferred Orientation on Si Substrate

Contributors:

Suzuki, H. (author) / Miwa, Y. (author) / Ohno, T. (author) / Fujimoto, M. (author)

Published in:

KEY ENGINEERING MATERIALS ; 301 ; 269-272

Publication date:

2006-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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