Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Characterization of Polycrystalline Si Films Produced by ArF Excimer Laser Irradiation

    New search for: Chen, T. T.
    New search for: Chang, C. Y.
    New search for: Jywe, W.
    New search for: Chen, C.-L.
    New search for: Fan, K.-C.
    New search for: Fung, R. F.
    New search for: Hanson, S. G.
    New search for: Hsieh, W.-H.
    New search for: Hsu, C.-L.
    New search for: Huang, Y.-M.
    New search for: Hwang, Y.-L.
    New search for: Jager, G.
    New search for: Jeng, Y. R.
    New search for: Li, W.
    New search for: Liao, Y.-S.
    New search for: Lin, C.-C.
    New search for: Lin, Z.-C.
    New search for: Sung, C.-K.
    New search for: Tzeng, C.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Characterization of Polycrystalline Si Films Produced by ArF Excimer Laser Irradiation

    New search for: Chen, T. T.
    New search for: Chang, C. Y.
    New search for: Jywe, W.
    New search for: Chen, C.-L.
    New search for: Fan, K.-C.
    New search for: Fung, R. F.
    New search for: Hanson, S. G.
    New search for: Hsieh, W.-H.
    New search for: Hsu, C.-L.
    New search for: Huang, Y.-M.
    New search for: Hwang, Y.-L.
    New search for: Jager, G.
    New search for: Jeng, Y. R.
    New search for: Li, W.
    New search for: Liao, Y.-S.
    New search for: Lin, C.-C.
    New search for: Lin, Z.-C.
    New search for: Sung, C.-K.
    New search for: Tzeng, C.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of Polycrystalline Si Films Produced by ArF Excimer Laser Irradiation

    New search for: Chen, T. T.
    New search for: Chang, C. Y.
    New search for: Jywe, W.
    New search for: Chen, C.-L.
    New search for: Fan, K.-C.
    New search for: Fung, R. F.
    New search for: Hanson, S. G.
    New search for: Hsieh, W.-H.
    New search for: Hsu, C.-L.
    New search for: Huang, Y.-M.
    New search for: Hwang, Y.-L.
    New search for: Jager, G.
    New search for: Jeng, Y. R.
    New search for: Li, W.
    New search for: Liao, Y.-S.
    New search for: Lin, C.-C.
    New search for: Lin, Z.-C.
    New search for: Sung, C.-K.
    New search for: Tzeng, C.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characterization of Polycrystalline Si Films Produced by ArF Excimer Laser Irradiation

    Contributors:

    Chen, T. T. (author) / Chang, C. Y. (author) / Jywe, W. / Chen, C.-L. / Fan, K.-C. / Fung, R. F. / Hanson, S. G. / Hsieh, W.-H. / Hsu, C.-L. / Huang, Y.-M.

    Published in:

    Progress on Advanced Manufacture for Micro/Nano Technology 2005: PART 1 - Proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28^t^h - December 2^n^d, 2005 ; 265-270

    MATERIALS SCIENCE FORUM ; 505/507

    Publication date:

    2006-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Excimer laser irradiation of SrRuO3 epitaxial thin films

    Benitez, F. / Roldan, J. / Trtik, V. et al. | British Library Online Contents | 2000

    Crystallisation of TiO2 thin films induced by excimer laser irradiation

    Van Overschelde, O. / Snyders, R. / Wautelet, M. | British Library Online Contents | 2007

    Electrostatic expansion of a tenuous plasma produced by excimer laser-irradiation of MgO

    Ermer, D. R. / Langford, S. C. / Dickinson, J. T. | British Library Online Contents | 1998

    Physico-chemical characterization of the effect of excimer laser irradiation on PMMA thin films

    Beauvois, S. / Renaut, D. / Lazzaroni, R. et al. | British Library Online Contents | 1997

    Substrate effect on excimer laser assisted crystal growth in phosphor Ca0.997Pr0.002TiO3 polycrystalline thin films

    Nakajima, T. / Tsuchiya, T. / Kumagai, T. | British Library Online Contents | 2007

    Back to top