Preparation of palladium film by coating photolysis process using KrF or ArF excimer laser: Fid-Bau Portal

Preparation of palladium film by coating photolysis process using KrF or ArF excimer laser

Imai, Y. / Tsunoda, T. / Kobayashi, K. / Watanabe, A.

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Preparation of palladium film by coating photolysis process using KrF or ArF excimer laser

Imai, Y. / Tsunoda, T. / Kobayashi, K. / Watanabe, A.

Preparation of palladium film by coating photolysis process using KrF or ArF excimer laser

Imai, Y. / Tsunoda, T. / Kobayashi, K. / Watanabe, A.

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Check availability in my library

Order at Subito €

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Document information

Title:

Preparation of palladium film by coating photolysis process using KrF or ArF excimer laser

Contributors:

Imai, Y. (author) / Tsunoda, T. (author) / Kobayashi, K. (author) / Watanabe, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 2858-2866

Publication date:

2006-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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