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Windowless argon excimer source for surface modification
Windowless argon excimer source for surface modification
Windowless argon excimer source for surface modification
Elsner, C. (author) / Lenk, M. (author) / Prager, L. (author) / Mehnert, R. (author)
APPLIED SURFACE SCIENCE ; 252 ; 3616-3624
2006-01-01
9 pages
Article (Journal)
English
DDC:
621.35
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