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Nano Scale Material Property Measurement of MEMS Material Using Piezo Actuated Material Testing Machine
Nano Scale Material Property Measurement of MEMS Material Using Piezo Actuated Material Testing Machine
Nano Scale Material Property Measurement of MEMS Material Using Piezo Actuated Material Testing Machine
Lee, H. J. (author) / Lee, N. K. (author) / Lee, H. W. (author) / Park, H. J. (author) / Choi, T. H. (author) / Kim, H. S. / Li, Y. B. / Lee, S. W.
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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