Misfit dislocation dipoles in Si/SiGe/Si heterostructures on SOI: Fid-Bau Portal

Misfit dislocation dipoles in Si/SiGe/Si heterostructures on SOI

Ma, T. / Tu, H. / Shao, B. / Liu, A. / Hu, G.

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Misfit dislocation dipoles in Si/SiGe/Si heterostructures on SOI

Ma, T. / Tu, H. / Shao, B. / Liu, A. / Hu, G.

Misfit dislocation dipoles in Si/SiGe/Si heterostructures on SOI

Ma, T. / Tu, H. / Shao, B. / Liu, A. / Hu, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Misfit dislocation dipoles in Si/SiGe/Si heterostructures on SOI

Contributors:

Ma, T. (author) / Tu, H. (author) / Shao, B. (author) / Liu, A. (author) / Hu, G. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 49-52

Publication date:

2006-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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