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Kinetic energy distributions of neutral In and In2 sputtered by polyatomic ion bombardment
Kinetic energy distributions of neutral In and In2 sputtered by polyatomic ion bombardment
Kinetic energy distributions of neutral In and In2 sputtered by polyatomic ion bombardment
Samartsev, A. V. (author) / Wucher, A. (author)
APPLIED SURFACE SCIENCE ; 252 ; 6470-6473
2006-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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