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Silicon surface passivation by static charge

Mizsei, J.

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Silicon surface passivation by static charge

Mizsei, J.

Silicon surface passivation by static charge

Mizsei, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Silicon surface passivation by static charge

Contributors:

Mizsei, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 7691-7699

Publication date:

2006-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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