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    Material Processing Using Femtosecond Lasers: Repairing Patterned Photomasks

    New search for: Haight, R.
    New search for: Longo, P.
    New search for: Wagner, A.

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    Material Processing Using Femtosecond Lasers: Repairing Patterned Photomasks

    New search for: Haight, R.
    New search for: Longo, P.
    New search for: Wagner, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Material Processing Using Femtosecond Lasers: Repairing Patterned Photomasks

    New search for: Haight, R.
    New search for: Longo, P.
    New search for: Wagner, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Material Processing Using Femtosecond Lasers: Repairing Patterned Photomasks

    Contributors:

    Haight, R. (author) / Longo, P. (author) / Wagner, A. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 31 ; 634-638

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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