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Simulations of the Dependence of Gas Physical Parameters on Deposition Variables during HFCVD Diamond Films
Simulations of the Dependence of Gas Physical Parameters on Deposition Variables during HFCVD Diamond Films
Simulations of the Dependence of Gas Physical Parameters on Deposition Variables during HFCVD Diamond Films
JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 22 ; 599-604
2006-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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