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Properties of silicon nanolayers on insulator

Naumova, O. V. / Vohmina, E. V. / Gavrilova, T. A. / Dudchenko, N. V. / Nikolaev, D. V. / Spesivtsev, E. V. / Popov, V. P.

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Properties of silicon nanolayers on insulator

Naumova, O. V. / Vohmina, E. V. / Gavrilova, T. A. / Dudchenko, N. V. / Nikolaev, D. V. / Spesivtsev, E. V. / Popov, V. P.

Properties of silicon nanolayers on insulator

Naumova, O. V. / Vohmina, E. V. / Gavrilova, T. A. / Dudchenko, N. V. / Nikolaev, D. V. / Spesivtsev, E. V. / Popov, V. P.

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Document information

Title:

Properties of silicon nanolayers on insulator

Contributors:

Naumova, O. V. (author) / Vohmina, E. V. (author) / Gavrilova, T. A. (author) / Dudchenko, N. V. (author) / Nikolaev, D. V. (author) / Spesivtsev, E. V. (author) / Popov, V. P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135 ; 238-241

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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