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Fundamental Limitations of SiC PVT Growth Reactors with Cylindrical Heaters
Fundamental Limitations of SiC PVT Growth Reactors with Cylindrical Heaters
Fundamental Limitations of SiC PVT Growth Reactors with Cylindrical Heaters
Drachev, R. (author) / Deyneka, E. (author) / Rhodes, C. (author) / Schupp, J. (author) / Sudarshan, T. S. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
2006-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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