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X-ray photoemission and X-ray absorption studies of Hf-silicate dielectric layers

O'Connor, R. / Hughes, G. / Glans, P. A. / Learmonth, T. / Smith, K. E.

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X-ray photoemission and X-ray absorption studies of Hf-silicate dielectric layers

O'Connor, R. / Hughes, G. / Glans, P. A. / Learmonth, T. / Smith, K. E.

X-ray photoemission and X-ray absorption studies of Hf-silicate dielectric layers

O'Connor, R. / Hughes, G. / Glans, P. A. / Learmonth, T. / Smith, K. E.

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Document information

Title:

X-ray photoemission and X-ray absorption studies of Hf-silicate dielectric layers

Contributors:

O'Connor, R. ( author ) / Hughes, G. ( author ) / Glans, P. A. ( author ) / Learmonth, T. ( author ) / Smith, K. E. ( author )

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 2770-2775

Publication date:

2006-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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