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Antiadhesion Surface Treatments of Molds for High-Resolution Unconventional Lithography
Antiadhesion Surface Treatments of Molds for High-Resolution Unconventional Lithography
Antiadhesion Surface Treatments of Molds for High-Resolution Unconventional Lithography
Lee, M. J. (author) / Lee, N. Y. (author) / Lim, J. R. (author) / Kim, J. B. (author) / Kim, M. (author) / Baik, H. K. (author) / Kim, Y. S. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 18 ; 3115-3119
2006-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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