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    Thermal relaxation of residual stresses in TiN films deposited by arc ion plating

    New search for: Matsue, T.
    New search for: Hanabusa, T.
    New search for: Ikeuchi, Y.

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    Thermal relaxation of residual stresses in TiN films deposited by arc ion plating

    New search for: Matsue, T.
    New search for: Hanabusa, T.
    New search for: Ikeuchi, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Thermal relaxation of residual stresses in TiN films deposited by arc ion plating

    New search for: Matsue, T.
    New search for: Hanabusa, T.
    New search for: Ikeuchi, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Thermal relaxation of residual stresses in TiN films deposited by arc ion plating

    Contributors:

    Matsue, T. (author) / Hanabusa, T. (author) / Ikeuchi, Y. (author)

    Published in:

    INTERNATIONAL JOURNAL OF MATERIALS RESEARCH ; 97 ; 1656-1660

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    1862-5282

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  669.9

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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