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Application of Atmospheric Pressure Plasma in the Ultrasmooth Polishing of SiC Optics
Application of Atmospheric Pressure Plasma in the Ultrasmooth Polishing of SiC Optics
Application of Atmospheric Pressure Plasma in the Ultrasmooth Polishing of SiC Optics
Wang, B. (author) / Zhao, Q. L. (author) / Wang, L. P. (author) / Dong, S. (author) / Jiang, C. / Liu, G. / Zhang, D. / Xu, X.
2007-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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