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    Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror

    New search for: Yin, S.
    New search for: Ohmori, H.
    New search for: Lin, W.
    New search for: Uehara, Y.
    New search for: Guo, D.
    New search for: Kuriyagawa, T.
    New search for: Wang, J.
    New search for: Tamaki, J.

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    Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror

    New search for: Yin, S.
    New search for: Ohmori, H.
    New search for: Lin, W.
    New search for: Uehara, Y.
    New search for: Guo, D.
    New search for: Kuriyagawa, T.
    New search for: Wang, J.
    New search for: Tamaki, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror

    New search for: Yin, S.
    New search for: Ohmori, H.
    New search for: Lin, W.
    New search for: Uehara, Y.
    New search for: Guo, D.
    New search for: Kuriyagawa, T.
    New search for: Wang, J.
    New search for: Tamaki, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror

    Contributors:

    Yin, S. (author) / Ohmori, H. (author) / Lin, W. (author) / Uehara, Y. (author) / Guo, D. / Kuriyagawa, T. / Wang, J. / Tamaki, J.

    Published in:

    Advances in Abrasive Technology IX ; 255-260

    KEY ENGINEERING MATERIALS ; 329

    Publication date:

    2007-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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