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Modeling the silicon-hafnia interface
Modeling the silicon-hafnia interface
Modeling the silicon-hafnia interface
Nieminen, R. M. (author) / Hakala, M. H. (author) / Foster, A. S. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 928-933
2006-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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