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    Relaxation of residual stresses in SiC wafers by annealing

    New search for: Chen, X.
    New search for: Xu, X.
    New search for: Hu, X.
    New search for: Li, J.
    New search for: Wang, Y.
    New search for: Jiang, S.

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    Relaxation of residual stresses in SiC wafers by annealing

    New search for: Chen, X.
    New search for: Xu, X.
    New search for: Hu, X.
    New search for: Li, J.
    New search for: Wang, Y.
    New search for: Jiang, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Relaxation of residual stresses in SiC wafers by annealing

    New search for: Chen, X.
    New search for: Xu, X.
    New search for: Hu, X.
    New search for: Li, J.
    New search for: Wang, Y.
    New search for: Jiang, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Relaxation of residual stresses in SiC wafers by annealing

    Contributors:

    Chen, X. (author) / Xu, X. (author) / Hu, X. (author) / Li, J. (author) / Wang, Y. (author) / Jiang, S. (author)

    Published in:

    RARE METALS -BEIJING- ENGLISH EDITION ; 25 ; 704-708

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    1001-0521

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  669

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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