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Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing
Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing
Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing
Namazu, T. (author) / Okamura, Y. (author) / Tashiro, Y. (author) / Inoue, S. (author) / Chandra, T. / Tsuzaki, K. / Militzer, M. / Ravindran, C.
2007-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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