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    Synthesis and characterization of tantalum nitride films prepared by cathodic vacuum arc technique

    New search for: Niu, E.
    New search for: Li, L.
    New search for: Lv, G.
    New search for: Feng, W.
    New search for: Chen, H.
    New search for: Fan, S.
    New search for: Yang, S.
    New search for: Yang, X.

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    Synthesis and characterization of tantalum nitride films prepared by cathodic vacuum arc technique

    New search for: Niu, E.
    New search for: Li, L.
    New search for: Lv, G.
    New search for: Feng, W.
    New search for: Chen, H.
    New search for: Fan, S.
    New search for: Yang, S.
    New search for: Yang, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Synthesis and characterization of tantalum nitride films prepared by cathodic vacuum arc technique

    New search for: Niu, E.
    New search for: Li, L.
    New search for: Lv, G.
    New search for: Feng, W.
    New search for: Chen, H.
    New search for: Fan, S.
    New search for: Yang, S.
    New search for: Yang, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Synthesis and characterization of tantalum nitride films prepared by cathodic vacuum arc technique

    Contributors:

    Niu, E. (author) / Li, L. (author) / Lv, G. (author) / Feng, W. (author) / Chen, H. (author) / Fan, S. (author) / Yang, S. (author) / Yang, X. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 5223-5227

    Publication date:

    2007-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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