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Hydrogen induced voids in hydrogenated amorphous silicon carbon (a-SiC:H): Results of effusion and diffusion studies
Hydrogen induced voids in hydrogenated amorphous silicon carbon (a-SiC:H): Results of effusion and diffusion studies
Hydrogen induced voids in hydrogenated amorphous silicon carbon (a-SiC:H): Results of effusion and diffusion studies
Saleh, R. (author) / Munisa, L. (author) / Beyer, W. (author)
APPLIED SURFACE SCIENCE ; 253 ; 5334-5340
2007-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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