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    Ti-Ca-P Films Formed by RF Magnetron Sputtering Method Using Dual Targets

    New search for: Watazu, A.
    New search for: Kimoto, K.
    New search for: Tsutomu, S.
    New search for: Tanaka, K.
    New search for: Sawada, T.
    New search for: Toyoda, M.
    New search for: Saito, N.
    New search for: Kim, H.
    New search for: Hojo, J.
    New search for: Lee, S. W.

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    Ti-Ca-P Films Formed by RF Magnetron Sputtering Method Using Dual Targets

    New search for: Watazu, A.
    New search for: Kimoto, K.
    New search for: Tsutomu, S.
    New search for: Tanaka, K.
    New search for: Sawada, T.
    New search for: Toyoda, M.
    New search for: Saito, N.
    New search for: Kim, H.
    New search for: Hojo, J.
    New search for: Lee, S. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ti-Ca-P Films Formed by RF Magnetron Sputtering Method Using Dual Targets

    New search for: Watazu, A.
    New search for: Kimoto, K.
    New search for: Tsutomu, S.
    New search for: Tanaka, K.
    New search for: Sawada, T.
    New search for: Toyoda, M.
    New search for: Saito, N.
    New search for: Kim, H.
    New search for: Hojo, J.
    New search for: Lee, S. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Ti-Ca-P Films Formed by RF Magnetron Sputtering Method Using Dual Targets

    Contributors:

    Watazu, A. (author) / Kimoto, K. (author) / Tsutomu, S. (author) / Tanaka, K. (author) / Sawada, T. (author) / Toyoda, M. (author) / Saito, N. (author) / Kim, H. / Hojo, J. / Lee, S. W.

    Published in:

    Eco-Materials Processing and Design VIII ; 495-498

    MATERIALS SCIENCE FORUM ; 544/545

    Publication date:

    2007-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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