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Proton beam writing
Proton beam writing
Proton beam writing
Watt, F. (author) / Breese, M. B. (author) / Bettiol, A. A. (author) / van Kan, J. A. (author)
MATERIALS TODAY -OXFORD THEN KIDLINGTON- ; 10 ; 20-29
2007-01-01
10 pages
Article (Journal)
English
DDC:
620.11299
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