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Prediction of Defects in Nano-Imprint Lithography Using FEM Simulation

Son, J. W. / Song, N. H. / Rhim, S. H. / Oh, S. I.

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Prediction of Defects in Nano-Imprint Lithography Using FEM Simulation

Son, J. W. / Song, N. H. / Rhim, S. H. / Oh, S. I.

Prediction of Defects in Nano-Imprint Lithography Using FEM Simulation

Son, J. W. / Song, N. H. / Rhim, S. H. / Oh, S. I.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Prediction of Defects in Nano-Imprint Lithography Using FEM Simulation

Contributors:

Son, J. W. (author) / Song, N. H. (author) / Rhim, S. H. (author) / Oh, S. I. (author) / Nam, S. W. / Chang, Y. W. / Lee, S. B. / Kim, N. J.

Published in:

The Mechanical Behavior of Materials X ; 665-668

KEY ENGINEERING MATERIALS ; 345/346

Publication date:

2007-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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