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Low dielectric constant silica films with ordered nanoporous structure

Shen, J. / Luo, A. / Yao, L. / Lin, X. / Zhou, B. / Wu, G. / Ni, X.

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Low dielectric constant silica films with ordered nanoporous structure

Shen, J. / Luo, A. / Yao, L. / Lin, X. / Zhou, B. / Wu, G. / Ni, X.

Low dielectric constant silica films with ordered nanoporous structure

Shen, J. / Luo, A. / Yao, L. / Lin, X. / Zhou, B. / Wu, G. / Ni, X.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Low dielectric constant silica films with ordered nanoporous structure

Contributors:

Shen, J. (author) / Luo, A. (author) / Yao, L. (author) / Lin, X. (author) / Zhou, B. (author) / Wu, G. (author) / Ni, X. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 27 ; 1145-1148

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

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