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Small-angle reciprocal space mapping of surface relief gratings
Small-angle reciprocal space mapping of surface relief gratings
Small-angle reciprocal space mapping of surface relief gratings
Birkholz, M. (author) / Zaumseil, P. (author) / Bauer, J. (author) / Bolze, D. (author) / Weidner, G. (author)
MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 27 ; 1154-1157
2007-01-01
4 pages
Article (Journal)
English
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