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Local Defectivity Control of 2D Self-Assembled Block Copolymer Patterns

Ruiz, R. / Ruiz, N. / Zhang, Y. / Sandstrom, R. L. / Black, C. T.

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Local Defectivity Control of 2D Self-Assembled Block Copolymer Patterns

Ruiz, R. / Ruiz, N. / Zhang, Y. / Sandstrom, R. L. / Black, C. T.

Local Defectivity Control of 2D Self-Assembled Block Copolymer Patterns

Ruiz, R. / Ruiz, N. / Zhang, Y. / Sandstrom, R. L. / Black, C. T.

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Check availability in my library

Order at Subito €

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Document information

Title:

Local Defectivity Control of 2D Self-Assembled Block Copolymer Patterns

Contributors:

Ruiz, R. (author) / Ruiz, N. (author) / Zhang, Y. (author) / Sandstrom, R. L. (author) / Black, C. T. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 19 ; 2157-2162

Publication date:

2007-01-01

Size:

6 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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