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High dielectric constant TiO2 film grown on polysilicon by liquid phase deposition

Lee, M. K. / Lee, H. C. / Hsu, C. M.

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High dielectric constant TiO2 film grown on polysilicon by liquid phase deposition

Lee, M. K. / Lee, H. C. / Hsu, C. M.

High dielectric constant TiO2 film grown on polysilicon by liquid phase deposition

Lee, M. K. / Lee, H. C. / Hsu, C. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

High dielectric constant TiO2 film grown on polysilicon by liquid phase deposition

Contributors:

Lee, M. K. (author) / Lee, H. C. (author) / Hsu, C. M. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 10 ; 61-67

Publication date:

2007-01-01

Size:

7 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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