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Annealing effect on structures and luminescence of amorphous SiN films

Xu, J. / Rui, Y. / Chen, D. / Mei, J. / Zhou, L. / Cen, Z. / Li, W. / Chen, K.

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Annealing effect on structures and luminescence of amorphous SiN films

Xu, J. / Rui, Y. / Chen, D. / Mei, J. / Zhou, L. / Cen, Z. / Li, W. / Chen, K.

Annealing effect on structures and luminescence of amorphous SiN films

Xu, J. / Rui, Y. / Chen, D. / Mei, J. / Zhou, L. / Cen, Z. / Li, W. / Chen, K.

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Order at Subito €

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Document information

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Document information

Title:

Annealing effect on structures and luminescence of amorphous SiN films

Contributors:

Xu, J. (author) / Rui, Y. (author) / Chen, D. (author) / Mei, J. (author) / Zhou, L. (author) / Cen, Z. (author) / Li, W. (author) / Chen, K. (author)

Published in:

MATERIALS LETTERS ; 61 ; 5010-5013

Publication date:

2007-01-01

Size:

4 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

DDC: 620.1105 / 530

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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