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Investigation of Ni/Ta contacts on 4H silicon carbide upon thermal annealing

Cao, Y. / Perez-Garcia, S. A. / Nyborg, L.

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Investigation of Ni/Ta contacts on 4H silicon carbide upon thermal annealing

Cao, Y. / Perez-Garcia, S. A. / Nyborg, L.

Investigation of Ni/Ta contacts on 4H silicon carbide upon thermal annealing

Cao, Y. / Perez-Garcia, S. A. / Nyborg, L.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Investigation of Ni/Ta contacts on 4H silicon carbide upon thermal annealing

Contributors:

Cao, Y. (author) / Perez-Garcia, S. A. (author) / Nyborg, L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 139-142

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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