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Deposition of TiSiN coatings by arc ion plating process

Guo, C. T. / Lee, D. / Chen, P. C.

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Deposition of TiSiN coatings by arc ion plating process

Guo, C. T. / Lee, D. / Chen, P. C.

Deposition of TiSiN coatings by arc ion plating process

Guo, C. T. / Lee, D. / Chen, P. C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deposition of TiSiN coatings by arc ion plating process

Contributors:

Guo, C. T. (author) / Lee, D. (author) / Chen, P. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 3130-3136

Publication date:

2008-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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