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Influences of Si pillar geometry on SiN-stressor induced local strain

Tanaka, M. / Sadoh, T. / Morioka, J. / Kitamura, T. / Miyao, M.

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Influences of Si pillar geometry on SiN-stressor induced local strain

Tanaka, M. / Sadoh, T. / Morioka, J. / Kitamura, T. / Miyao, M.

Influences of Si pillar geometry on SiN-stressor induced local strain

Tanaka, M. / Sadoh, T. / Morioka, J. / Kitamura, T. / Miyao, M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Influences of Si pillar geometry on SiN-stressor induced local strain

Contributors:

Tanaka, M. (author) / Sadoh, T. (author) / Morioka, J. (author) / Kitamura, T. (author) / Miyao, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 6226-6228

Publication date:

2008-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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