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Oblique Angle Deposition of Columnar Niobium Films for Capacitor Application

Tanvir, M.T. / Fushimi, K. / Aoki, Y. / Habazaki, H.

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Oblique Angle Deposition of Columnar Niobium Films for Capacitor Application

Tanvir, M.T. / Fushimi, K. / Aoki, Y. / Habazaki, H.

Oblique Angle Deposition of Columnar Niobium Films for Capacitor Application

Tanvir, M.T. / Fushimi, K. / Aoki, Y. / Habazaki, H.

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Document information

Title:

Oblique Angle Deposition of Columnar Niobium Films for Capacitor Application

Contributors:

Tanvir, M.T. (author) / Fushimi, K. (author) / Aoki, Y. (author) / Habazaki, H. (author)

Published in:

MATERIALS TRANSACTIONS ; 49 ; 1320-1326

Publication date:

2008-01-01

Size:

7 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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