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Area-selectively sputtering the RuO2 nanorods array

Lee, W. T. / Tsai, D. S. / Chen, Y. M. / Huang, Y. S. / Chung, W. H.

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Area-selectively sputtering the RuO2 nanorods array

Lee, W. T. / Tsai, D. S. / Chen, Y. M. / Huang, Y. S. / Chung, W. H.

Area-selectively sputtering the RuO2 nanorods array

Lee, W. T. / Tsai, D. S. / Chen, Y. M. / Huang, Y. S. / Chung, W. H.

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Document information

Title:

Area-selectively sputtering the RuO2 nanorods array

Contributors:

Lee, W. T. (author) / Tsai, D. S. (author) / Chen, Y. M. (author) / Huang, Y. S. (author) / Chung, W. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 6915-6921

Publication date:

2008-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Lin, Y. S. / Lee, K. Y. / Chen, K. Y. et al. | British Library Online Contents | 2009

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Impedance spectroscopy study of RuO2/SrTiO3 thin film capacitors prepared by radio-frequency magnetron sputtering

Reddy, Y. K. / Mergel, D. / Osswald, W. | British Library Online Contents | 2006

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