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Fullerene solutions to chip manufacture: Water-soluble fullerence resists make lithography safer
Fullerene solutions to chip manufacture: Water-soluble fullerence resists make lithography safer
Fullerene solutions to chip manufacture: Water-soluble fullerence resists make lithography safer
MATERIALS WORLD ; 16 ; 17
2008-01-01
17 pages
Article (Journal)
English
DDC:
620.11
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