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Predicting secondary ion formation in molecular dynamics simulations of sputtering

Weidtmann, B. / Duvenbeck, A. / Wucher, A.

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Predicting secondary ion formation in molecular dynamics simulations of sputtering

Weidtmann, B. / Duvenbeck, A. / Wucher, A.

Predicting secondary ion formation in molecular dynamics simulations of sputtering

Weidtmann, B. / Duvenbeck, A. / Wucher, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Predicting secondary ion formation in molecular dynamics simulations of sputtering

Contributors:

Weidtmann, B. (author) / Duvenbeck, A. (author) / Wucher, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 813-815

Publication date:

2008-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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