Synthesis of p-type Al-N codoped ZnO films using N2O as a reactive gas by RF magnetron sputtering: Fid-Bau Portal

Synthesis of p-type Al-N codoped ZnO films using N2O as a reactive gas by RF magnetron sputtering

Chou, S. M. / Hon, M. H. / Leu, I. C.

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Synthesis of p-type Al-N codoped ZnO films using N2O as a reactive gas by RF magnetron sputtering

Chou, S. M. / Hon, M. H. / Leu, I. C.

Synthesis of p-type Al-N codoped ZnO films using N2O as a reactive gas by RF magnetron sputtering

Chou, S. M. / Hon, M. H. / Leu, I. C.

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Document information

Title:

Synthesis of p-type Al-N codoped ZnO films using N2O as a reactive gas by RF magnetron sputtering

Contributors:

Chou, S. M. (author) / Hon, M. H. (author) / Leu, I. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 2958-2962

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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