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    Defect and dopant kinetics in laser anneals of Si

    New search for: La Magna, A.
    New search for: Fisicaro, G.
    New search for: Mannino, G.
    New search for: Privitera, V.
    New search for: Piccitto, G.
    New search for: Svensson, B. G.
    New search for: Vines, L.

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    Defect and dopant kinetics in laser anneals of Si

    New search for: La Magna, A.
    New search for: Fisicaro, G.
    New search for: Mannino, G.
    New search for: Privitera, V.
    New search for: Piccitto, G.
    New search for: Svensson, B. G.
    New search for: Vines, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Defect and dopant kinetics in laser anneals of Si

    New search for: La Magna, A.
    New search for: Fisicaro, G.
    New search for: Mannino, G.
    New search for: Privitera, V.
    New search for: Piccitto, G.
    New search for: Svensson, B. G.
    New search for: Vines, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Defect and dopant kinetics in laser anneals of Si

    Contributors:

    La Magna, A. (author) / Fisicaro, G. (author) / Mannino, G. (author) / Privitera, V. (author) / Piccitto, G. (author) / Svensson, B. G. (author) / Vines, L. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 35-38

    Publication date:

    2008-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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