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Defect engineering aspects of advanced Ge process modules

Claeys, C. / Simoen, E. / Opsomer, K. / Brunco, D. P. / Meuris, M.

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Defect engineering aspects of advanced Ge process modules

Claeys, C. / Simoen, E. / Opsomer, K. / Brunco, D. P. / Meuris, M.

Defect engineering aspects of advanced Ge process modules

Claeys, C. / Simoen, E. / Opsomer, K. / Brunco, D. P. / Meuris, M.

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Check availability in my library

Order at Subito €

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Document information

Title:

Defect engineering aspects of advanced Ge process modules

Contributors:

Claeys, C. (author) / Simoen, E. (author) / Opsomer, K. (author) / Brunco, D. P. (author) / Meuris, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 49-55

Publication date:

2008-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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