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Influence of assisted ion energy on surface roughness and mechanical properties of boron carbon nitride films synthesized by DIBSD
Influence of assisted ion energy on surface roughness and mechanical properties of boron carbon nitride films synthesized by DIBSD
Influence of assisted ion energy on surface roughness and mechanical properties of boron carbon nitride films synthesized by DIBSD
Yang, X. M. (author) / Wu, X. M. (author) / Zhuge, L. J. (author) / Zhou, F. (author)
APPLIED SURFACE SCIENCE ; 255 ; 4279-4282
2009-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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