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    Improvements in Electrical Properties of SiC Surface Using Mechano-Chemical Polishing

    New search for: Hotta, K.
    New search for: Hirose, K.
    New search for: Tanaka, Y.
    New search for: Kawata, K.
    New search for: Eryu, O.

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    Improvements in Electrical Properties of SiC Surface Using Mechano-Chemical Polishing

    New search for: Hotta, K.
    New search for: Hirose, K.
    New search for: Tanaka, Y.
    New search for: Kawata, K.
    New search for: Eryu, O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Improvements in Electrical Properties of SiC Surface Using Mechano-Chemical Polishing

    New search for: Hotta, K.
    New search for: Hirose, K.
    New search for: Tanaka, Y.
    New search for: Kawata, K.
    New search for: Eryu, O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Improvements in Electrical Properties of SiC Surface Using Mechano-Chemical Polishing

    Contributors:

    Hotta, K. (author) / Hirose, K. (author) / Tanaka, Y. (author) / Kawata, K. (author) / Eryu, O. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 600/603 ; 823-826

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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