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A Comparison of Transient Boron Diffusion in Silicon, Silicon Carbide and Diamond

Linnarsson, M.K. / Isberg, J. / Schoner, A. / Hallen, A.

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A Comparison of Transient Boron Diffusion in Silicon, Silicon Carbide and Diamond

Linnarsson, M.K. / Isberg, J. / Schoner, A. / Hallen, A.

A Comparison of Transient Boron Diffusion in Silicon, Silicon Carbide and Diamond

Linnarsson, M.K. / Isberg, J. / Schoner, A. / Hallen, A.

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Document information

Title:

A Comparison of Transient Boron Diffusion in Silicon, Silicon Carbide and Diamond

Contributors:

Linnarsson, M.K. (author) / Isberg, J. (author) / Schoner, A. (author) / Hallen, A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 453-456

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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