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Physical and electrical characteristics of a high-k Yb2O3 gate dielectric

Pan, T. M. / Huang, W. S.

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Physical and electrical characteristics of a high-k Yb2O3 gate dielectric

Pan, T. M. / Huang, W. S.

Physical and electrical characteristics of a high-k Yb2O3 gate dielectric

Pan, T. M. / Huang, W. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Physical and electrical characteristics of a high-k Yb2O3 gate dielectric

Contributors:

Pan, T. M. (author) / Huang, W. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 4979-4982

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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