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Synthesis of regular nano-pitched carbon nanotube array by using nanosphere lithography for interconnect applications
Synthesis of regular nano-pitched carbon nanotube array by using nanosphere lithography for interconnect applications
Synthesis of regular nano-pitched carbon nanotube array by using nanosphere lithography for interconnect applications
Xu, T. (author) / Miao, J. (author) / Ashraf, M. (author) / Lin, N. (author) / Chollet, F. (author)
MATERIALS LETTERS ; 63 ; 867-869
2009-01-01
3 pages
Article (Journal)
English
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