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Dry etching characteristics of GaN for blue/green light-emitting diode fabrication

Baik, K. H. / Pearton, S. J.

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Dry etching characteristics of GaN for blue/green light-emitting diode fabrication

Baik, K. H. / Pearton, S. J.

Dry etching characteristics of GaN for blue/green light-emitting diode fabrication

Baik, K. H. / Pearton, S. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Dry etching characteristics of GaN for blue/green light-emitting diode fabrication

Contributors:

Baik, K. H. (author) / Pearton, S. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 5948-5951

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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